RF Magnetron Sputtering System for Metals & Non-Metals: Insulators, Semiconductors, Carbon-Based Thin Film Deposition
Contact Person:Louis Yang Email: Louis@chinabatterymachine.com Tel:+86 13003860308 Whatsapp: +86 13003860308 Wechat:18659217588
Email: Louis@chinabatterymachine.com
Tel:+86 13003860308
Whatsapp: +86 13003860308
Wechat:18659217588
Item No.:
Lith-BY-JS10Payment:
L/C D/A D/P T/T Western UnionShipping port:
Xiamen PortLead Time:
5 daysSmall Auto Vaccum Carbon DC Sputter Coater
Model: Lith-BY-JS10 – Product Specifications
| Parameter | Specification |
|---|---|
| Model Number | Lith-BY-JS10 |
| Vacuum Pump | Oil-required Rotary Vacuum Pump (Explicit oil filling needed) |
| Pumping Speed | 50Hz: 16 m³/h (4.4 L/s) • 60Hz: 19.2 m³/h (5.2 L/s) • 20% speed boost at 60Hz |
| Ultimate Vacuum | 2 Pa |
| Max Sputtering Current | 1.6A |
| Operating Pressure Range | 20 Pa – 8 Pa |
| Pump-Down Time | <5 min (to 2 Pa) |
| Vacuum Measurement Range | Atmospheric pressure to 2×10⁷ mbar |
| Gas Control System | Precision Gas Flow Controller |
| Chamber Specifications | Ø350 × 240mm (H) • Scratch-resistant quartz glass viewport |
| Target Specifications | Ø200mm • Materials: Au, Ag, Pt, Cu (noble/conductive metals) |
| Operation | Instruction manual guided |
| Dimensions/Weight | 490(L) × 400(W) × 590(H) mm • 70 kg |
| Power Requirements | Dual-voltage: AC 110V/60Hz (Americas) or AC 220V/50Hz (Europe/Asia) |
| Power Consumption | <1500W |
| Warranty & Support | 1-year limited warranty + lifetime technical support |
Online service
Louis@chinabatterymachine.com
+8618659217588